Our equipment for the semiconductor industry.
Speciality Gas Supply Equipment
We provide you complete solutions for the supply of semiconductor, TFT/LCD and Photovoltaic processes with specialty gases (ESG = Electronic Specialty Gases).
Chemistry Supply System
Chemical supply systems from Air Liquide offer full lifecycle support for virtually any wet process application.
Abatement System
With our Green-Fab abatement system, you can handle the residual process gases in such a way that they can be safely released into the environment.
Installations
Besides the high-purity gas and chemical supply, we provide for you also all the necessary installation services for these media.