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Equipment  [ Return towards  Electronic (Semiconductors, TFT-LCD) ]

Our equipment for the semiconductor industry.

Bulk Gas Supply Equipment

Tanks and on-site facilities for the semiconductor industry

 

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Speciality Gas Supply Equipment

We provide you complete solutions for the supply of semiconductor, TFT/LCD and Photovoltaic processes with specialty gases (ESG = Electronic Specialty Gases).

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Chemistry Supply System

Chemical supply systems from Air Liquide offer full lifecycle support for virtually any wet process application.

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Abatement System

With our Green-Fab abatement system, you can handle the residual process gases in such a way that they can be safely released into the environment.

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Installations

Besides the high-purity gas and chemical supply, we provide for you also all the necessary installation services for these media.

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Consult the Gas Encyclopedia

Properties of 138 Gases

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