Electronics [ Return towards Gas Supply ]

In the continuously evolving areas of semiconductors and flat panel display, Air Liquide China closely supports its customers with leading-edge technologies and high value-added services.

Air Liquide set up Air Liquide Shanghai and started its activity in Cao He Jing Development Zone in Shanghai in 1990 to meet the needs of manufacturers of semiconductors. In addition to the supply of carrier gases for electronics customers in China, Air Liquide also plays an active role in specialty gases supply, “gas cabinets” and turnkey piping system engineering. Air Liquide is investing an Electronics Materials Center in Zhangjiagang to produce electronics specialty gases.

Our main customers include ASMC, Hynix, Shanghai Belling, GSMC, Shaoxing Huayue, SGNEC, SMIC Wuhan, BOE-OT, etc.

Our four business activities：

Bulk gas supply and on-site plants

- Carrier gases (nitrogen, oxygen, hydrogen, etc)

-Online analysis and testing service of these gases

Electronics Specialty Gas supply

- Varieties of high purity carrier gases & gas mixtures

- Excimer laser gases - KrF, CrF

Electronics project engineering

- Ultrahigh purity piping and equipment installation

- Design, manufacturing and installation of chemical dispense system and fluid distribution equipment

Total Gas and Chemical Management service